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Vacuum Accessories

Power supply

Power supply

DC power supply, MF power supply, RF power supply, arc power supply, bias power supply and so on.

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Vacuum pump

Vacuum pump

KT&DPM series oil diffusion pump, rotary vane vacuum pump, roots pump, turbo molecular pump and so on.

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Vacuum pump oil

Vacuum pump oil

Rotary vacuum pump oil and diffusion pump oil.

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Consumption materials & targets

Consumption materials & targets

Tungsten wires, aluminum wires, copper wires, titanium targets, zirconium targets, chromium targets, rectangular target, plane cathode target, columnar target and so on.

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